4

Real time scatterometry for profile control during resist trimming process

Year:
2009
Language:
english
File:
PDF, 989 KB
english, 2009
9

4-{[(3,5-dimethyl-1H-pyrazol-1-yl)methyl]amino}benzoic acid

Year:
2004
Language:
english
File:
PDF, 49 KB
english, 2004
10

1-(4-{[(3,5-dimethyl-1H-pyrazol-1-yl)methyl] amino} phenyl) ethanone

Year:
2004
Language:
english
File:
PDF, 50 KB
english, 2004
11

2-{bis[(1,5-dimethyl-1H-pyrazol-3-yl)methyl]amino}ethanol

Year:
2004
Language:
english
File:
PDF, 47 KB
english, 2004
21

Resist trimming etch process control using dynamic scatterometry

Year:
2009
Language:
english
File:
PDF, 330 KB
english, 2009